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Course10810616522 lectures

A Brief introduction of Micro - Sensors

Prof. Santanu Talukder · IISER Bhopal

Start with lecture 1 At NPTEL

Lectures

Week 1

  1. Introduction to Microscale Sensors or MEMS Video
  2. Scaling effect Video
  3. Some Simple Mechanics Video
  4. Basic Mechanics - Part 01 Video
  5. Basic Mechanics - Part 02 Video
  6. Basic Mechanics - Part 03 Video

Week 2

  1. Electrostatics Video
  2. Electrostatic force Video
  3. Coupled electromechanics Video
  4. Stiction Video

Week 3

  1. Si crystal structure Video
  2. Si etching Video
  3. KOH etching Video
  4. TMAH etching Video
  5. Deposition and Lithography Video
  6. Lithography Video

Week 4

  1. Pressure Sensor - I Video
  2. Pressure Sensor - II Video
  3. Pressure Sensor - III Video
  4. Accelerometer - I Video
  5. Accelerometer - II Video

Live Session

  1. Live Session 09-03-2020 Video

Syllabus and materials

At NPTEL, as the course publishes them.

Credits and licence

Institution
IISER Bhopal
Department
Electrical Engineering
Teacher
Prof. Santanu Talukder
Level
Undergraduate
Language
English
Subjects
Engineering
Source
NPTEL
Licence
CC BY-NC-SA, as NPTEL states it. Non-commercial use only. NPTEL's terms
Attribution
NPTEL states: "Distributed under Creative Commons Attribution-ShareAlike / CC BY - NC - SA", beside a BY-NC-SA badge. Coordinated by IIT Madras.
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