Learn · A Brief introduction of Micro - Sensors
Lecture 5 of 22Week 1
Basic Mechanics - Part 02
Prof. Santanu Talukder · IISER Bhopal
Credits and licence
- From
- A Brief introduction of Micro - Sensors, IISER Bhopal (at NPTEL)
- Licence
- CC BY-NC-SA, as NPTEL states it. Non-commercial use only.
- Attribution
- NPTEL states: "Distributed under Creative Commons Attribution-ShareAlike / CC BY - NC - SA", beside a BY-NC-SA badge. Coordinated by IIT Madras.
- Who can watch
- Tweens profiles and older. How courses are placed
All the lectures
- Introduction to Microscale Sensors or MEMS
- Scaling effect
- Some Simple Mechanics
- Basic Mechanics - Part 01
- Basic Mechanics - Part 02
- Basic Mechanics - Part 03
- Electrostatics
- Electrostatic force
- Coupled electromechanics
- Stiction
- Si crystal structure
- Si etching
- KOH etching
- TMAH etching
- Deposition and Lithography
- Lithography
- Pressure Sensor - I
- Pressure Sensor - II
- Pressure Sensor - III
- Accelerometer - I
- Accelerometer - II
- Live Session 09-03-2020