Learn · A Brief introduction of Micro - Sensors

Lecture 16 of 22Week 3

Lithography

Prof. Santanu Talukder · IISER Bhopal

Credits and licence

From
A Brief introduction of Micro - Sensors, IISER Bhopal (at NPTEL)
Licence
CC BY-NC-SA, as NPTEL states it. Non-commercial use only.
Attribution
NPTEL states: "Distributed under Creative Commons Attribution-ShareAlike / CC BY - NC - SA", beside a BY-NC-SA badge. Coordinated by IIT Madras.
Who can watch
Tweens profiles and older. How courses are placed

All the lectures

  1. Introduction to Microscale Sensors or MEMS Video
  2. Scaling effect Video
  3. Some Simple Mechanics Video
  4. Basic Mechanics - Part 01 Video
  5. Basic Mechanics - Part 02 Video
  6. Basic Mechanics - Part 03 Video
  7. Electrostatics Video
  8. Electrostatic force Video
  9. Coupled electromechanics Video
  10. Stiction Video
  11. Si crystal structure Video
  12. Si etching Video
  13. KOH etching Video
  14. TMAH etching Video
  15. Deposition and Lithography Video
  16. Lithography Video
  17. Pressure Sensor - I Video
  18. Pressure Sensor - II Video
  19. Pressure Sensor - III Video
  20. Accelerometer - I Video
  21. Accelerometer - II Video
  22. Live Session 09-03-2020 Video