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A nanofabricated electron-beam lithograph.

Course6.781J / 2.391J7 lectures

Submicrometer and Nanometer Technology

Prof. George Barbastathis, Prof. Henry Smith and Prof. Karl Berggren · Massachusetts Institute of Technology

Start with lecture 1 At MIT OpenCourseWare

About

This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, microphotonics, information storage, and nanotechnology will also be explored.

Acknowledgements

The Instructors would like to thank Bob Barsotti, Bryan Cord, and Ben Wunsch for their work on the Atomic Force Microscope video. They would also like to thank Bryan Cord for creating each video.

Lectures

Videos

  1. SEM Inspection (no audio) Video
  2. SEM Sample Preparation (no audio) Video
  3. SEM Sample Mounting (no audio) Video
  4. Surface Profilometer (no audio) Video
  5. Atomic Force Microscope (no audio) Video
  6. Photoresist Spin (no audio) Video
  7. Contact Lithography (no audio) Video

Syllabus and materials

At MIT OpenCourseWare, as the course publishes them.

Credits and licence

Institution
Massachusetts Institute of Technology
Department
Electrical Engineering and Computer Science; Mechanical Engineering
Taught by
Prof. George Barbastathis, Prof. Henry Smith, Prof. Karl Berggren
Term
Spring 2006
Level
Graduate
Language
English
Subjects
Computer science, Engineering
Source
MIT OpenCourseWare
Licence
CC BY-NC-SA 4.0, as MIT OpenCourseWare states it. Non-commercial use only. MIT OpenCourseWare's terms
Attribution
Prof. George Barbastathis, Prof. Henry Smith, Prof. Karl Berggren. Submicrometer and Nanometer Technology. Spring 2006. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu/. License: Creative Commons BY-NC-SA.
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