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Course11710609340 lectures

VLSI Technology

Prof. Prof. Nandita Dasgupta · IIT Madras

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Lectures

VLSI Technology

  1. Introduction on VLSI Design Video
  2. Bipolar Junction Transistor Fabrication Video
  3. MOSFET Fabrication for IC Video
  4. Crystal Structure of Si Video
  5. Crystal Structure contd Video
  6. Defects in Crystal + Crystal growth Video
  7. Crystal growth Contd + Epitaxy I Video
  8. Epitaxy II - Vapour phase Epitaxy Video
  9. Epitaxy III - Doping during Epitaxy Video
  10. Molecular beam Epitaxy Video
  11. Oxidation I - Kinetics of Oxidation Video
  12. Oxidation II Oxidation rate constants Video
  13. Oxidation III - Dopant Redistribution Video
  14. Oxidation IV - Oxide Charges Video
  15. Diffusion I - Theory of Diffusion Video
  16. Diffusion II - Infinite Source Video
  17. Diffusion III - Actual Doping Profiles Video
  18. Diffusion IV Diffusion Systems Video
  19. Ion - Implantation Process Video
  20. Ion - Implantation Process Video
  21. Annealing of Damages Video
  22. Masking during Implantation Video
  23. Lithography - I Video
  24. Lithography - II Video
  25. Wet Chemical Etching Video
  26. Dry Etching Video
  27. Plasma Etching Systems Video
  28. Etching of Si,Sio2,SiN and other materials Video
  29. Plasma Deposition Process Video
  30. Metallization - I Video
  31. Problems in Aluminium Metal contacts Video
  32. IC BJT - From junction isolation to LOCOS Video
  33. Problems in LOCOS + Trench isolation Video
  34. More about BJT Fabrication and Realization Video
  35. Circuits + Transistors in ECL Circuits Video
  36. MOSFET I - Metal gate vs. Self-aligned Poly-gate Video
  37. MOSFET II Tailoring of Device Parameters Video
  38. CMOS Technology Video
  39. Latch - up in CMOS Video
  40. BICMOS Technology Video

Syllabus and materials

At NPTEL, as the course publishes them.

Credits and licence

Institution
IIT Madras
Department
Electronics & Communication Engineering
Teacher
Prof. Prof. Nandita Dasgupta
Level
Undergraduate
Language
English
Subjects
Engineering, Society and politics
Source
NPTEL
Licence
CC BY-NC-SA, as NPTEL states it. Non-commercial use only. NPTEL's terms
Attribution
NPTEL states: "Distributed under Creative Commons Attribution-ShareAlike / CC BY - NC - SA", beside a BY-NC-SA badge.
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