Learn · Physics of Microfabrication: Front End Processing
Lecture 17 of 21Audio Lectures
19. Thin Film Deposition and Epitaxy - Modeling Topography of Deposition
Prof. Judy Hoyt and Prof. L. Rafael Reif · Massachusetts Institute of Technology
Credits and licence
- From
- Physics of Microfabrication: Front End Processing, Massachusetts Institute of Technology (at MIT OpenCourseWare)
- Licence
- CC BY-NC-SA 4.0, as MIT OpenCourseWare states it. Non-commercial use only.
- Attribution
- Prof. Judy Hoyt, Prof. L. Rafael Reif. Physics of Microfabrication: Front End Processing. Fall 2004. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu/. License: Creative Commons BY-NC-SA.
- Who can watch
- Tweens profiles and older. How courses are placed
All the lectures
- 3. Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)
- 4. Wafer Cleaning and Gettering (cont.)
- 5. Wafer Cleaning and Gettering - Contamination Measurement Techniques
- 6. Oxidation and the Si/SiO2 Interface. Deal/Grove Model, Thin Oxide Models
- 7. Oxidation and the Si/SiO2 Interface. 2D Effects, Doping Effects, Point Defect
- 8. Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic
- 9. Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects
- 10. Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion
- 11. Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques
- 12. Ion Implantation and Annealing - Analytic Models and Monte Carlo
- 13. Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED
- 14. Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction
- 15. Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail
- 16. The SUPREM IV Process Simulator
- 17. Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth
- 18. Thin Film Deposition and Epitaxy - CVD Examples and PVD
- 19. Thin Film Deposition and Epitaxy - Modeling Topography of Deposition
- 20. Etching - Introduction
- 21. Etching - Poly Gate Etching, Stringers, Modeling of Etching
- 22. Silicides, Device Contacts, Novel Gate Materials
- 23. Growth and Processing of Strained Si/SiGe and Stress Effects on Devices