Learn · Physics of Microfabrication: Front End Processing

Lecture 15 of 21Audio Lectures

17. Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth

Prof. Judy Hoyt and Prof. L. Rafael Reif · Massachusetts Institute of Technology

At MIT OpenCourseWare Transcript

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Physics of Microfabrication: Front End Processing, Massachusetts Institute of Technology (at MIT OpenCourseWare)
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CC BY-NC-SA 4.0, as MIT OpenCourseWare states it. Non-commercial use only.
Attribution
Prof. Judy Hoyt, Prof. L. Rafael Reif. Physics of Microfabrication: Front End Processing. Fall 2004. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu/. License: Creative Commons BY-NC-SA.
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All the lectures

  1. 3. Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.) Video
  2. 4. Wafer Cleaning and Gettering (cont.) Video
  3. 5. Wafer Cleaning and Gettering - Contamination Measurement Techniques Video
  4. 6. Oxidation and the Si/SiO2 Interface. Deal/Grove Model, Thin Oxide Models Video
  5. 7. Oxidation and the Si/SiO2 Interface. 2D Effects, Doping Effects, Point Defect Video
  6. 8. Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic Video
  7. 9. Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects Video
  8. 10. Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion Video
  9. 11. Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques Video
  10. 12. Ion Implantation and Annealing - Analytic Models and Monte Carlo Video
  11. 13. Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED Video
  12. 14. Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction Video
  13. 15. Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail Video
  14. 16. The SUPREM IV Process Simulator Video
  15. 17. Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth Video
  16. 18. Thin Film Deposition and Epitaxy - CVD Examples and PVD Video
  17. 19. Thin Film Deposition and Epitaxy - Modeling Topography of Deposition Video
  18. 20. Etching - Introduction Video
  19. 21. Etching - Poly Gate Etching, Stringers, Modeling of Etching Video
  20. 22. Silicides, Device Contacts, Novel Gate Materials Video
  21. 23. Growth and Processing of Strained Si/SiGe and Stress Effects on Devices Video