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Thin Film Technology

Prof. Samit K Ray · IIT Kharagpur

Start with lecture 1 At NPTEL

About

Thin film technology is the backbone for building monolithically integrated semiconductor devices, modern computers, energy and healthcare systems.Varieties of metallic, semiconducting, superconducting and insulating materials with controlled mechanical, electrical and optical properties are integrated today to form hetrostructures and superlattices for advanced functional devices and systems, This is an interdisciplinary space course suitable for undergraduate and postgraduate spaced and science students covering the technologies forfthin film deposition, characterization and fabrication of nanoscaledevices.

Intended audience: PG and UG students of Electronics engineering, Metallurgical & materials engineering, Chemical engineering, Bio engineering and PhD and M.Sc. students of Physics, Chemistry and Materials Sciences

Prerequisites: UG course on Solid State Physics, Introduction to Materials or Basic Electronics

Lectures

Week 1

  1. Lecture -1 : General Introduction YouTube
  2. Lecture-2 : Thin Film Materials & Components YouTube
  3. Lecture-3 : Semiconductor Films & Heterostructures YouTube
  4. Lecture-4: Chemical Methods YouTube
  5. Lecture-5 : Physical Vapor Deposition (PVD) : Thermal Evaporation YouTube

Week 2

  1. Lecture-6 : Thermal Evaporation YouTube
  2. Lecture-7 :Sources of Thermal Evaporation YouTube
  3. Lecture-8 : Evaporation of Elements & Compounds YouTube
  4. Lecture-9 : Compound Evaporation & Thickness Uniformity YouTube
  5. Lecture-10 : Film Thickness Monitoring & Control YouTube

Week 3

  1. Lecture-11: Pulsed Laser Deposition YouTube
  2. Lecture-12: Sputtering Process & Mechanism YouTube
  3. Lecture-13 : Plasma Discharge and DC Sputtering YouTube
  4. Lecture-14 : RF Sputtering Process YouTube
  5. Lecture-15 : Magnetron Sputtering YouTube

Week 4

  1. Lecture -16: Sputtering of Binary Alloys & Compounds YouTube
  2. Lecture-17 : Ion Beam and Hybrid Deposition YouTube
  3. Lecture-18 :Introduction to CVD Process YouTube
  4. Lecture -19 : Thermal CVD Process YouTube
  5. Lecture-20 : Gas Transport & Growth Kinetics YouTube

Week 5

  1. Lecture -21 :CVD Processes and Systems YouTube
  2. Lecture-22 : Plasma Enhanced CVD (PECVD) YouTube
  3. Lecture-23 : Liquid Phase Epitaxy YouTube
  4. Lecture-24 : Vapor Phase Epitaxy - Compound Semiconductors YouTube
  5. Lecture-25 :Metal-Organic CVD (MOCVD) YouTube

Week 6

  1. Lecture -26 : Introduction & Film Purity YouTube
  2. Lecture -27 : MBE System & Growth Mechanism YouTube
  3. Lecture -28 : Effusion Source & Growth Rate YouTube
  4. Lecture -29: Insitu Growth Monitoring - RHEED Oscillation YouTube
  5. Lecture -30 : Atomic Layer Deposition / Atomic Layer Epitaxy YouTube

Week 7

  1. Lecture-31 : Thin Film Growth Modes YouTube
  2. Lecture -32 : Homogeneous Nucleation YouTube
  3. Lecture-33 : Heterogenous Nucleation YouTube
  4. Lecture-34 : Stranski-Krastanov (2D-3D) Growth Mode YouTube
  5. Lecture-35 : SiGe Strained Layer Epitaxy (2D) & Ge Islands (3D) YouTube

Week 8

  1. Lecture -36 : Thickness Measurement YouTube
  2. Lecture - 37 : Thickness Measurement - Interference Method YouTube
  3. Lecture-38: Thickness & Optical Constants - Ellipsometry YouTube
  4. Lecture -39 : Mechanical Properties - Film Porosity & Adhesion YouTube
  5. Lecture -40 : Mechanical Properties – Residual Stress YouTube

Week 9

  1. Lecture - 41: Electron Beam Techniques - SEM YouTube
  2. Lecture - 42 : Scanning Electron Microscopy YouTube
  3. Lecture-43 : Microprobe & Transmission Electron Microscopy YouTube
  4. Lecture - 44 : Transmission Electron Microscopy YouTube
  5. Lecture - 45 : Scanning Probe Microscopy YouTube

Week 10

  1. Lecture - 46 : X-ray Photoelectron Spectroscopy YouTube
  2. Lecture - 47 : Auger Electron Spectroscopy YouTube
  3. Lecture - 48 : Secondary Ion Mass Spectrometry (SIMS) YouTube
  4. Lecture - 49 : Different SIMS Techniques & Depth Profile Analysis YouTube
  5. Lecture - 50 : Rutherford Backscattering Spectrometry (RBS) YouTube

Week 11

  1. Lecture - 51 : Basic Device Fabrication Techniques YouTube
  2. Lecture - 52 : Metal-Oxide-Semiconductor (MOS) Capacitor YouTube
  3. Lecture - 53 : n-MOSFET & CMOS FET Devices YouTube
  4. Lecture - 54 : Scaled Si MOSFET Devices YouTube
  5. Lecture - 55 : Heterostructure FET and Bipolar Transistors YouTube

Week 12

  1. Lecture - 56 : Optoelectronic Materials & Devices YouTube
  2. Lecture - 57 : Light Emitting Devices YouTube
  3. Lecture - 58 : Photodetector Devices YouTube
  4. Lecture - 59 : Photovoltaic Devices YouTube
  5. Lecture -60 : Nanotechnology & Photonic Devices YouTube

Syllabus and materials

At NPTEL, as the course publishes them.

Credits and licence

Institution
IIT Kharagpur
Department
Multidisciplinary
Teacher
Prof. Samit K Ray
Level
Undergraduate
Language
English
Subjects
Art, architecture and design
Source
NPTEL
Licence
CC BY-NC-SA, as NPTEL states it. Non-commercial use only. NPTEL's terms
Attribution
NPTEL states: "Distributed under Creative Commons Attribution-ShareAlike / CC BY - NC - SA", beside a BY-NC-SA badge.
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