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Chemical Engineering Principles of CVD Processes

Dr. R. Nagarajan · IIT Madras

Start with lecture 1 At NPTEL

Lectures

Module 1

  1. Introduction Video
  2. CVD Reactor & Process Design Fundamentals Video
  3. Overview of CVD Process Fundamentals Video
  4. Basics of Chemical Equilibrium Calculations & Flow Dynamics Video
  5. Introduction to CVD Films Video
  6. Film Structure & Properties Video
  7. Pressure Effects on CVD Processes Video
  8. CVD of Metals Video
  9. CVD of Coatings Video
  10. CVD Film Property Measurements Video
  11. CVD Film Property Measurements: Qualitative & Quantitative Video
  12. CVD in Tungsten Filament Lamps Video
  13. CVD in Tungsten Filament Lamps: Design Aspects Video
  14. CVD in Hot Corrosion Video

Module 2

  1. CVD Transport Phenomena: Conservation Equations Video
  2. CVD Transport Phenomena: Constitutive Laws Video
  3. CVD Transport Phenomena: Mass Transfer Mechanisms Video
  4. CVD Transport Phenomena: Mass Transfer Analogy Condition (MTAC) Video
  5. CVD Transport Phenomena: Effect of Homogeneous Reactions on MTAC Video

Module 3

  1. CVD Applications: Hot Filament CVD (HFCVD) Video
  2. CVD Applications: Aerosol CVD (ACVD) Video
  3. CVD Applications: CVD of Silicon Video
  4. CVD Applications: CVD in Free-Molecular Flow Regime (FMFR) Video
  5. CVD Applications: CVD of nano-Structured Films Video

Module 4

  1. CVD Overview Video

Module 5

  1. Basics of Nano-Structured Material Synthesis: Part I Video
  2. Basics of Nano-Structured Material Synthesis: Part II Video

Syllabus and materials

At NPTEL, as the course publishes them.

Credits and licence

Institution
IIT Madras
Department
Chemical Engineering
Teacher
Dr. R. Nagarajan
Level
Undergraduate
Language
English
Subjects
Chemistry, Engineering
Source
NPTEL
Licence
CC BY-NC-SA, as NPTEL states it. Non-commercial use only. NPTEL's terms
Attribution
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