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Lecture 56 of 60week-12

Lecture 56: Vacuum Technology for semiconductor chip manufacturing

Prof. V. Vasudeva Rao · IIT Kharagpur

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Vacuum Technology & Process Application, IIT Kharagpur (at NPTEL)
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CC BY-NC-SA, as NPTEL states it. Non-commercial use only.
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All the lectures

  1. Lecture 01: Introduction to Vacuum, Natural Vacuum Video
  2. Lecture 02: History of Vacuum Technology Video
  3. Lecture 03: Kinetic Theory of Gases, Physical Parameters of Vacuum and Regions of Vacuum Video
  4. Lecture 04: Vacuum Process Applications - I Video
  5. Lecture 05: Vacuum Process Applications - II Video
  6. Lecture 06: Pumping Speed and Throughput Concepts Video
  7. Lecture 07: Rotary Vacuum Pump Video
  8. Lecture 08: Diffusion Pump Video
  9. Lecture 09: Roots Vacuum Pump Video
  10. Lecture 10: Rotary Piston Pump Video
  11. Lecture 11: Liquid Ring Pump Video
  12. Lecture 12: Steam Jet Ejector Video
  13. Lecture 13: Diaphragm Pump Video
  14. Lecture 14: Claw Pump Video
  15. Lecture 15: Screw Pump Video
  16. Lecture 16: Scroll Pump, Sorption Concepts and Pumps Video
  17. Lecture 17: Ion Pumping-Sputter Ion Pump Video
  18. Lecture 18: Turbomolecular Pump Video
  19. Lecture 19: Cryopumps Video
  20. Lecture 20: Selection Criteria of Vacuum Pumps Video
  21. Lecture 21: Primary vs Secondary Gauges, U Tube/McLeod gauges (Primary) Video
  22. Lecture 22: Bourdon/Capacitance Gauges (Mechanical Deflection) Video
  23. Lecture 23: Thermo-couple/ Pirani gauges(Thermal Conductivity) Video
  24. Lecture 24: Spinning Rotor/ Ionization/ Bayard Alpert Gauges Video
  25. Lecture 25: Penning/ Inverted Magnetron gauges, Gauge calibration Video
  26. Lecture 26: Vacuum Materials (Metals, Glasses, Ceramics, Greases & Oils) Video
  27. Lecture 27: Vacuum Components (Flanges, Couplings, Seals, Valves) Video
  28. Lecture 28: Vacuum Chamber Design Video
  29. Lecture 29: Fabrication Techniques for Vacuum Systems Video
  30. Lecture 30: Testing of Vacuum Systems for Mechanical Failures, Gas Leaks and Outgassing Video
  31. Lecture 31 Gas Flow at Low Pressures, Conductance & Effective Pumping Speed Concepts Video
  32. Lecture 32 Conductance Calculations in Viscous Flow Region Video
  33. Lecture 33 Molecular Flow Video
  34. Lecture 34 Transition and Choked Flows Video
  35. Lecture 35 Conductance and Pump Down Calculations in Vacuum Systems Video
  36. Lecture 36 Design Aspects of Vacuum Systems for Different Applications – Part I Video
  37. Lecture 37 Design Aspects of Vacuum Systems for Different Applications – Part II Video
  38. Lecture 38 Design of a Vacuum Furnace for Metallurgical Processing Video
  39. Lecture 39 Leak Detection in Vacuum Systems Video
  40. Lecture 40 Magnetic Deflection Leak Detector and Quadrupole Residual Gas Analyzer Video
  41. Lecture 41 Vacuum Processes in Chemical and Pharmaceutical Industries Video
  42. Lecture 42 Vacuum for Food Processing Video
  43. Lecture 43 Vacuum Technology in the Packaging Industry Video
  44. Lecture 44 Vacuum in Wood Industry Video
  45. Lecture 45 Vacuum Systems for Medical and Dental Applications Video
  46. Lecture 46 Vacuum for Desalination of Sea Water & Treatment of Waste Water Video
  47. Lecture 47 Vacuum Technology for Power Sector Video
  48. Lecture 48 Vacuum Technology In Oil and Gas Industries Video
  49. Lecture 49 Vacuum Technology in LNG industry Video
  50. Lecture 50 Vacuum Technology for Cryogenic Applications Video
  51. Lecture 51: Vacuum Technology in High Speed Transportation (Hyperloop & Maglev) Video
  52. Lecture 52: Vacuum technology for Metallurgical applications Video
  53. Lecture 53: Vacuum Technology for Analytical Instruments Video
  54. Lecture 54: Vacuum based coating units for thin film deposition Video
  55. Lecture 55: Vacuum for solar energy (Thermal and PV) Video
  56. Lecture 56: Vacuum Technology for semiconductor chip manufacturing Video
  57. Lecture 57 : Vacuum Technology for Display Systems Video
  58. Lecture 58: Vacuum Technology for Nuclear Applications - Part - I Video
  59. Lecture 59: Vacuum Technology for Nuclear Applications - Part - II Video
  60. Lecture 60: Vacuum technology for Space Applications Video