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Lecture 9 of 40Microfabrication processes

Approaches for Pattern Transfer

Prof. K.N. Bhat and others · IISc Bangalore

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Micro and Smart Systems, IISc Bangalore (at NPTEL)
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CC BY-NC-SA, as NPTEL states it. Non-commercial use only.
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All the lectures

  1. Glimpses of Microsystems: Scaling Effects Video
  2. Smart Materials and Systems Video
  3. Microsensors Video
  4. Microactuators Video
  5. Microsystems: some Examples Video
  6. Smart systems Application and Structural Health Monitoring Video
  7. Microfabrication Technologies Video
  8. Thin-film Materials and their Deposition Video
  9. Approaches for Pattern Transfer Video
  10. Surface Micromachining of Microstructures Video
  11. Bulk Micromachining of Microsystems Video
  12. Extended Approaches for Working Microsystems Video
  13. Non-conventional Approaches for Microsystems Video
  14. Packaging of Microsystems Video
  15. Deformation Strains and Stresses Video
  16. Microdevice Suspensions: Lumped Modeling Video
  17. Residual Stress and Stress Gradients Video
  18. Torsion and Twist Video
  19. Vibrations of Microsystems Devices: Part -1 Video
  20. Vibrations of Microsystems Devices: Part -2 Micromachined Gyroscopes: Part -1 Video
  21. Micromachined Gyroscopes: Part -2 Modelling of Coupled Electrostatic Microsystems: Part -1 Video
  22. Modelling of Coupled Electrostatic Microsystems: Part -2 Video
  23. Coupled Electrothermal-elastic Modelling Video
  24. Modelling of Microsystems: Scaling Effects Video
  25. Finite Element Method and Microsystems Video
  26. Theoretical Basis for the Finite Element Method Video
  27. Energy Theorems and Weak Form of the Governing Equation Video
  28. Finite Element Equation Development and Shape Functions Video
  29. Isoparametric FE Formulation and some Examples Video
  30. Finite Element for Structures with Piezoelectric Material Video
  31. Semiconductor Device Physics Video
  32. BJT and MOSFET Characteristics and Op-Amps Video
  33. Op-Amp Circuits and Signal conditioning for Microsystems Devices Video
  34. Control and Microsystems Video
  35. Vibration Control of a Beam Video
  36. Signal Conditioning Circuits and Integration of Microsystems and Microelectronics Video
  37. Pressure Sensor Design Concepts, Processing, and Packaging: Part -1 Video
  38. Pressure Sensor Design Concepts, Processing, and Packaging: Part -2 Video
  39. Pressure Sensor Design Concepts, Processing, and Packaging: Part -3 Capacitive Micro-accelerometer: Part -1 Video
  40. Capacitive Micro-accelerometer: Part -2 Video