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Course10810486539 lectures

Basic Overview of Semiconductor Device Processing and IC Fabrication

Prof. S. Sundar Kumar Iyer · IIT Kanpur

Start with lecture 1 At NPTEL

Lectures

Week 0

  1. Lecture 1: General Introduction of Course Video
  2. Lecture 2: Historical Perspective on IC Technology Video
  3. Lecture 3: Scaling Trends in IC Fabrication Video
  4. Lecture 4: Moore's Law Video
  5. Lecture 5: Scaling of MOSFET Video

Week 2

  1. Lecture 6: Enablers of VLSI Technology - Part I Video
  2. Lecture 7: Enablers of VLSI Technology - Part II Video
  3. Lecture 8: Some Background Information Video
  4. Lecture 9: Planar Processing of n+-p Diode Video
  5. Lecture 10: CMOS Processing - Masks Involved Video

Week 3

  1. Lecture 11: CMOS Planar Processing - Part I Video
  2. Lecture 12: CMOS Planar Processing - Part II Video
  3. Lecture 13: A Glimpse of Advanced FET Structure Evolution Video

Week 4

  1. Lecture 14: IC Packaging - Far Back End of Line Video
  2. Lecture 15: Vacuum Systems - Part I Video
  3. Lecture 16: Vacuum Systems - Part II Video

Week 5

  1. Lecture 17: Plasma for Semiconductor Processing Video
  2. Lecture 18: Crystalline Substrates - Part I Video
  3. Lecture 19: Crystalline Substrates - Part II Video

Week 6

  1. Lecture 20: Crystalline Silicon Substrates Video
  2. Lecture 21: Silicon on Insulator (SOI) Substrates Video
  3. Lecture 22: GaAs and Other Substrates Video

Week 7

  1. Lecture 23: Oxidation of Silicon - Part I Video
  2. Lecture 24: Oxidation of Silicon - Part II Video
  3. Lecture 25: Thermal Nitridation of Silicon Video

Week 8

  1. Lecture 26: Diffusion - Part I Video
  2. Lecture 27: Diffusion - Part II Video
  3. Lecture 28: Diffusion – Part III Video

Week 9

  1. Lecture 29: Ion Implantation - Part I Video
  2. Lecture 30: Ion Implantation - Part II Video

Week 10

  1. Lecture 31: Thin Film Process Video
  2. Lecture 32: Chemical Vapour Deposition (CVD) - Part I Video

Week 11

  1. Lecture 33: Chemical Vapour Deposition (CVD) - Part II Video
  2. Lecture 34: Physical Vapour Deposition (PVD) Video

Week 12

  1. Lecture 35: Lithography Video
  2. Lecture 36: Etch Process Video
  3. Lecture 37: Statistical Tools for Processing Video
  4. Lecture 38: Concluding Comments Video
  5. Lecture 39: Printing Process For Thin Films (Supplementary Lecture) Video

Syllabus and materials

At NPTEL, as the course publishes them.

Credits and licence

Institution
IIT Kanpur
Department
Electrical Engineering
Teacher
Prof. S. Sundar Kumar Iyer
Level
Undergraduate
Language
English
Subjects
Engineering
Source
NPTEL
Licence
CC BY-NC-SA, as NPTEL states it. Non-commercial use only. NPTEL's terms
Attribution
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