Learn · Electrical Engineering 143 - Fall 2014

Lecture 3 of 212014-09-231 h 22 min

Electrical Engineering 143 - 2014-09-23: Lithography II: Optics, Resolution, Alignment Accuracy

Clark Tu-cuong Nguyen · University of California, Berkeley

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Electrical Engineering 143 - Fall 2014, University of California, Berkeley (at Internet Archive)
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Copyright UC Regents 2014
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All the lectures

  1. Electrical Engineering 143 - 2014-09-16:Layout to Cross-Section, Design Rules 1 h 21 min · Video
  2. Electrical Engineering 143 - 2014-09-18: Lithography I: Radiation Sources, Masks, Photoresist 1 h 20 min · Video
  3. Electrical Engineering 143 - 2014-09-23: Lithography II: Optics, Resolution, Alignment Accuracy 1 h 22 min · Video
  4. Electrical Engineering 143 - 2014-09-25: Oxidation I: Thermal Oxidation Models, Deposition Methods 1 h 23 min · Video
  5. Electrical Engineering 143 - 2014-09-30: Oxidation II: Graphs, Dopant Redistribution, Device Isolation 1 h 23 min · Video
  6. Electrical Engineering 143 - 2014-10-02: Physical Film Deposition: Evaporation, Sputtering 1 h 21 min · Video
  7. Electrical Engineering 143 - 2014-10-07: Chemical Film Deposition -- LPCVD, PECVD, ALD, Epitaxy 1 h 23 min · Video
  8. Electrical Engineering 143 - 2014-10-09: Etching I -- Anisotropy, Selectivity, Wet Etching 1 h 22 min · Video
  9. Electrical Engineering 143 - 2014-10-14: Ion Implantation I -- Etching II: Plasma Etching, Reactive Ion Etching 1 h 21 min · Video
  10. Electrical Engineering 143 - 2014-10-16: Ion Implantation I -- Range & Straggle, Lateral Straggle, Jcn. Depth 1 h 20 min · Video
  11. Electrical Engineering 143 - 2014-10-21: Ion Implantation II -- I/I Through Layers, Tables 1 h 22 min · Video
  12. Electrical Engineering 143 - 2014-10-23: Diffusion I -- Predeposition, Drive-In, Modeling 1 h 19 min · Video
  13. Electrical Engineering 143 - 2014-10-28: Diffusion II: 2-Step Diffusion, Successive Diffusions, Lateral Diffusion 1 h 20 min · Video
  14. Electrical Engineering 143 - 2014-11-04: Diffusion III: Series Resistance, Irvin’s Curves, Concentration Dep. 1 h 12 min · Video
  15. Electrical Engineering 143 - 2014-11-06: Interconnects: Contacts, Metallization, Silicides, Damascene Proc. 1 h 19 min · Video
  16. Electrical Engineering 143 - 2014-11-13: Metal MEMS, Adv. CMOS I: Device Structure, Process Flow 1 h 16 min · Video
  17. Electrical Engineering 143 - 2014-11-18: Adv. CMOS II: Process Flow (cont.), Punchthrough 1 h 20 min · Video
  18. Electrical Engineering 143 - 2014-11-20: Adv. Isolation: Problems w/ LOCOS, Trench Isolation 1 h 19 min · Video
  19. Electrical Engineering 143 - 2014-11-25: Device Characterization I: MOS-CV Curve --> xox, Na, VFB 1 h 21 min · Video
  20. Electrical Engineering 143 - 2014-12-02: Vt Implant: Threshold Voltage, Shallow vs. Deep Vt Implant 1 h 21 min · Video
  21. Electrical Engineering 143 - 2014-12-04: Device Characterization II: MOS Device Models, MOS IV Curve --> L, W, mobility, Body effect; Latch-Up, Course Wrap Up 1 h 5 min · Video