Learn · Electrical Engineering C245 / Mechanical Engineering C218 - Fall 2011
Lecture 9 of 252011-09-221 h 13 min
Lecture 9: Surface Micromachining III
Clark Tu-Cuong Nguyen · University of California, Berkeley
Credits and licence
- From
- Electrical Engineering C245 / Mechanical Engineering C218 - Fall 2011, University of California, Berkeley (at Internet Archive)
- Licence
- CC BY-NC-ND 3.0, as Internet Archive states it. Non-commercial use only, and no changed versions.
- Who can watch
- Tweens profiles and older. How courses are placed
All the lectures
- Lecture 1: Introduction
- Lecture 2: Benefits of Scaling I
- Lecture 3: Benefits of Scaling II
- Lecture 4: Benefits of Scaling III
- Lecture 5: Fabrication Process Modules I
- Lecture 6: Fabrication Process Modules II
- Lecture 7: Surface Micromachining I
- Lecture 8: Surface Micromachining II
- Lecture 9: Surface Micromachining III
- Lecture 10: Bulk Micromachining
- Lecture 12: Mechanics of Materials for MEMS II
- Lecture 13: Mechanics of Materials for MEMS III
- Lecture 14: Energy Methods I
- Lecture 15: Energy Methods II
- Lecture 16: Equivalent Circuits I
- Lecture 18: Lossless Transducers I
- Lecture 19: Lossless Transducers II
- Lecture 20: Equivalent Circuits III
- Lecture 21: Equivalent Circuits IV
- Lecture 22: Sensing Circuits I
- Lecture 23: Sensing Circuits II
- Lecture 24: Sensing Circuits III
- Lecture 25: Sensor Resolution I
- Lecture 26: Sensor Resolution II
- Lecture 27: MEMS-Transistor Integration