Learn · Electrical Engineering C245 / Mechanical Engineering C218 - Fall 2010

Lecture 8 of 262010-09-211 h 23 min

Lecture 8: Surface Micromachining: Lithography, Etching and Doping

Clark Tu-Cuong Nguyen · University of California, Berkeley

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Electrical Engineering C245 / Mechanical Engineering C218 - Fall 2010, University of California, Berkeley (at Internet Archive)
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All the lectures

  1. Lecture 1 1 h 24 min · Video
  2. Lecture 2: Benefits of Scaling I: faster speed (transistors, micromechanical resonators) 1 h 22 min · Video
  3. Lecture 3: Benefits of Scaling II: lower power consumption (micro-ovens), higher sensitivity (gas sensors) 1 h 22 min · Video
  4. Lecture 4: Benefits of Scaling III 25 min · Video
  5. Lecture 5: Process Modules I: Oxidation and Film Deposition 1 h 21 min · Video
  6. Lecture 6: Process Modules II: Oxidation, Film Deposition, Lithography Etching, and Doping 1 h 23 min · Video
  7. Lecture 7: Process Modiles III: Lithography, Etching, and Doping 1 h 20 min · Video
  8. Lecture 8: Surface Micromachining: Lithography, Etching and Doping 1 h 23 min · Video
  9. Lecture 9: Surface Micromachining II 1 h 22 min · Video
  10. Lecture 10: Surface Micromachining and Surface Micromachining III 1 h 19 min · Video
  11. Lecture 11: Mechanics of Materials for MEMS II: quality factor, beam bending 1 h 20 min · Video
  12. Lecture 12: Mechanics of Materials III: practical stress, beam combos, stressed folded flexures 1 h 22 min · Video
  13. Lecture 13: Energy Methods I: virtual work, energy formulations, tapered beam example 1 h 22 min · Video
  14. Lecture 14: Energy Methods II: clamped-clamped beam example, large deflection analysis, estimating resonance frequency 1 h 22 min · Video
  15. Lecture 15: Equivalent Circuits I: dynamic mass, stiffness, and damping, example: free-free beam, lumped mass-spring-damper circuit 1 h 22 min · Video
  16. Lecture 16: Equivalent Circuits II: electromechanical analogies, lossless transducers 1 h 22 min · Video
  17. Lecture 17: Lossless Transducers I: capacitive transducers, charge control, voltage control, spring suspend C, parallel-plate capacitive transducer, pull-in linearization 1 h 22 min · Video
  18. Lecture 18: Lossless Transducers II: electrical stiffness, comb drive, levitation 1 h 21 min · Video
  19. Lecture 19: Equivalent Circuits III: input modeling, force-to-velocity relationship and circuit, intro. to gyroscopes 1 h 19 min · Video
  20. Lecture 20: Equivalent Circuits IV: output modeling, input-to-output transconductance, complete equivalent circuit 1 h 22 min · Video
  21. Lecture 21: Sensing Circuits I: ideal op amps, velocity sensing, position sensing 1 h 15 min · Video
  22. Lecture 22: Sensing Circuits II: differential position sensing, MEMS/transistor integration 1 h 24 min · Video
  23. Lecture 23: Sensing Circuits III: non-ideal op amps, begin noise 1 h 20 min · Video
  24. Lecture 24: Sensor Resolution I: noise sources, noise calculation, min. detectable signal 1 h 21 min · Video
  25. Lecture 25: Sensor Resolution II: noise calculation examples, gyro example 1 h 23 min · Video
  26. Lecture 26: MEMS-Transistor Integration mixed, MEMS-first, MEMS-last 1 h 7 min · Video