Learn · Mechanical Engineering 119 - Fall 2008
Lecture 16 of 232008-10-301 h 17 min
Lecture 19: Summary of Surface-micromachining
Liwei LIN · University of California, Berkeley
Credits and licence
- From
- Mechanical Engineering 119 - Fall 2008, University of California, Berkeley (at Internet Archive)
- Licence
- CC BY-NC-ND 3.0, as Internet Archive states it. Non-commercial use only, and no changed versions.
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- Tweens profiles and older. How courses are placed
All the lectures
- Lecture 1
- Lecture 2
- Lecture 3
- Lecture 4
- Lecture 5
- Lecture 8
- Lecture 9
- Lecture 10
- Lecture 11
- Lecture 12
- Lecture 13: Diffusion, Project
- Lecture 14: Heactuator, Review
- Lecture 16; Thin Film Deposition, Vertical Comb.
- Lecture 17: Thin Film Deposition, Scartch Drive
- Lecture 18: Project Introduction
- Lecture 19: Summary of Surface-micromachining
- Lecture 20: Project Layouts
- Lecture 21: Design Rules & Project Layouts
- Lecture 22: Bulk-Micromachining I
- Lecture 24: Bulk-Micromachining III
- Lecture 25: LIGA Process, Review
- Lecture 27: Exam II
- Lecture 28: Project Presentation