24: Electromigration — Read — Invisible Network

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https://www.doitpoms.ac.uk/tlplib/

Learning Objectives

On completion of this TLP you should:

understand the process of electromigration
be aware of how damage is caused by electromigration and the ways in which such damage is minimized
know the reasons for changing from Al-based to Cu-based metallization.

Before you start

It would help to look through the Diffusion section within the Matter software, though the Diffusion TLP, but this TLP is mostly self-explanatory.

24.1: Introduction
24.2: The Theory of Electromigration
24.3: Electromigration Damage
24.4: Flux Divergence
24.5: Avoiding Electromigration Problems
24.6: Alternatives to Aluminium Metallization
24.7: Summary
24.8: Questions

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Contents

Text

Before you start