Course38 lectures29 h 31 min
EE 246/ME219 - Spring 2008
Albert Pisano · University of California, Berkeley
About
EE 246/ME 219 - Spring 2008 - Parametric design and optimal design will be applied to MEMS, with an emphasis on design and not on fabrication. The format of the course will be oriented toward design projects. The student will learn to rigorously formulate MEMS design problems analytically and then determine the correct dimensions of MEMS structures so that the specified function is achieved. The formulation will allow the student to trade off various performance requirements and thereby develop a rational design compromise solution when faced with conflicting design requirements. A variety of MEMS structures will be treated in this class, including flexure systems, accelerometers and rate sensors. A variety of design and optimization methods will be used to numerically and analytically determine the design. This course presumes the student is already familiar with a variety of basic MEMS fabrication processes. ME 119 and ME C218/EE245 are highly recommended (but not mandatory) prerequisites.
Microelectromechanical Systems
Lectures
- MEMS Overview: Unique Characteristics of MEMS, Typical Application Areas of MEMS
- MEMS Overview: Examples of MEMS, Future Directions of MEMS
- MEMS Solutions for Data Storage: Technical Rationale, HexSil Linear Actuator
- MEMS Solutions for Data Storage: V-HARM, Fabrication Issues, Other Technologies (First 10 minutes of lecture not in podcast)
- MEMS Fexures: Overview, Technical Rationale, Examples
- MEMS Flexures: Optimal Design, Basic Flexure Types, Hammock, Crab-leg and Double Folded
- MEMS Flexures: Stress Analysis, Flexible Design Method, Unified Beam Bending Theory
- MEMS Accelerometer: Dynamic Principles, Design, Analysis, Survey of Accelerometers
- MEMS Flexures: Meandering Flexures, Solving Procedures
- MEMS Flexures: Non-linear Limits, Shear and Axial Effect
- MEMS Flexures: Electrostatic Actuation, Derivation
- MEMS Materials: Mechanical Properties of Materials, MEMS Material Deposition Process
- MEMS Materials: Failure of Materials, MEMS Materials Test
- MEMS Anchors: Background, Fabrication, Finite Element Model
- Distributed Parameter Oscillator: Rayleigh's Principle, Rayleigh's Energy Method
- MEMS Angular Accelerometer: Design Concept, Analysis
- MEMS Optimization: design, Optimization Paradigm, Examples
- MEMS Optimization: Monotonicity Analysis
- MEMS Optimization: Monotonicity Analysis 2
- MEMS Optimization: Monotonicity Analysis 3
- MEMS Optimization: Penalty Function Method
- MEMS Optimization: Unconstrained Optimization, Method of Steepest Descent
- MEMS Optimization: Quadratic Approximation, Conjugate Directional Method
- MEMS Optimization: Lagrange Multiplier Method
- MEMS Pivots: Stress Analysis
- MEMS Pivots: Stress Evaluation, Design Approach
- MEMS Fluidics: Overview
- MEMS Fluidics: Micro Mixers
- MEMS Fluidics: Micro Valves and Pumps
- MEMS Flow: Newtonian Fluids, Couette Flow, Viscous Damping of Resonators
- MEMS Flow: Stokes Solution, Effect of Reynolds Number
- MEMS Flow: Surface Energy, Bubble Actuators, Bubble Valve
- MEMS Visualization: Methods and Results
- MEMS Inertial Instument: Rotary Internal Combustion Engine (Lecture is only 22 minutes)
- MEMS Inertial Instument: Angular Rate Sensing
- MEMS Inertial Instument: Review of Gyroscopes
- MEMS Inertial Instuments: ADXL50
- MEMS Research: Programs at DARPA
Credits and licence
- Institution
- University of California, Berkeley
- Teacher
- Albert Pisano
- Year
- 2008
- Level
- Undergraduate
- Language
- English
- Source
- Internet Archive
- Licence
- Internet Archive states no licence for it. Internet Archive's terms
- Attribution
- 2006 Regents of the University of California
- Who can watch
- Internet Archive gives no rating. Invisible Network shows it to Teens profiles and older, judged from what the source says about it. How courses are placed