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Course26 lectures33 h 51 min

Electrical Engineering C245 / Mechanical Engineering C218 - Fall 2010

Clark Tu-Cuong Nguyen · University of California, Berkeley

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EL ENG C245 LEC 001 Fa10

Introduction to MEMS Design

Lectures

  1. Lecture 1 2010-08-26 · 1 h 24 min · Audio
  2. Lecture 2: Benefits of Scaling I: faster speed (transistors, micromechanical resonators) 2010-09-01 · 1 h 22 min · Audio
  3. Lecture 3: Benefits of Scaling II: lower power consumption (micro-ovens), higher sensitivity (gas sensors) 2010-09-02 · 1 h 22 min · Audio
  4. Lecture 4: Benefits of Scaling III 2010-09-07 · 25 min · Audio
  5. Lecture 5: Process Modules I: Oxidation and Film Deposition 2010-09-09 · 1 h 21 min · Audio
  6. Lecture 6: Process Modules II: Oxidation, Film Deposition, Lithography Etching, and Doping 2010-09-14 · 1 h 23 min · Audio
  7. Lecture 7: Process Modiles III: Lithography, Etching, and Doping 2010-09-16 · 1 h 20 min · Audio
  8. Lecture 8: Surface Micromachining: Lithography, Etching and Doping 2010-09-21 · 1 h 23 min · Audio
  9. Lecture 9: Surface Micromachining II 2010-09-23 · 1 h 22 min · Audio
  10. Lecture 10: Surface Micromachining and Surface Micromachining III 2010-09-28 · 1 h 19 min · Audio
  11. Lecture 11: Mechanics of Materials for MEMS II: quality factor, beam bending 2010-09-30 · 1 h 20 min · Audio
  12. Lecture 12: Mechanics of Materials III: practical stress, beam combos, stressed folded flexures 2010-10-05 · 1 h 22 min · Audio
  13. Lecture 13: Energy Methods I: virtual work, energy formulations, tapered beam example 2010-10-07 · 1 h 22 min · Audio
  14. Lecture 14: Energy Methods II: clamped-clamped beam example, large deflection analysis, estimating resonance frequency 2010-10-12 · 1 h 22 min · Audio
  15. Lecture 15: Equivalent Circuits I: dynamic mass, stiffness, and damping, example: free-free beam, lumped mass-spring-damper circuit 2010-10-14 · 1 h 22 min · Audio
  16. Lecture 16: Equivalent Circuits II: electromechanical analogies, lossless transducers 2010-10-19 · 1 h 22 min · Audio
  17. Lecture 17: Lossless Transducers I: capacitive transducers, charge control, voltage control, spring suspend C, parallel-plate capacitive transducer, pull-in linearization 2010-10-21 · 1 h 22 min · Audio
  18. Lecture 18: Lossless Transducers II: electrical stiffness, comb drive, levitation 2010-10-26 · 1 h 21 min · Audio
  19. Lecture 19: Equivalent Circuits III: input modeling, force-to-velocity relationship and circuit, intro. to gyroscopes 2010-10-28 · 1 h 19 min · Audio
  20. Lecture 20: Equivalent Circuits IV: output modeling, input-to-output transconductance, complete equivalent circuit 2010-11-04 · 1 h 22 min · Audio
  21. Lecture 21: Sensing Circuits I: ideal op amps, velocity sensing, position sensing 2010-11-09 · 1 h 15 min · Audio
  22. Lecture 22: Sensing Circuits II: differential position sensing, MEMS/transistor integration 2010-11-16 · 1 h 24 min · Audio
  23. Lecture 23: Sensing Circuits III: non-ideal op amps, begin noise 2010-11-20 · 1 h 20 min · Audio
  24. Lecture 24: Sensor Resolution I: noise sources, noise calculation, min. detectable signal 2010-11-23 · 1 h 21 min · Audio
  25. Lecture 25: Sensor Resolution II: noise calculation examples, gyro example 2010-11-30 · 1 h 23 min · Audio
  26. Lecture 26: MEMS-Transistor Integration mixed, MEMS-first, MEMS-last 2010-12-02 · 1 h 7 min · Audio

Credits and licence

Institution
University of California, Berkeley
Teacher
Clark Tu-Cuong Nguyen
Year
2010
Level
Undergraduate
Language
English
Subjects
Engineering, Art, architecture and design
Source
Internet Archive
Licence
CC BY-NC-ND 3.0, as Internet Archive states it. Non-commercial use only, and no changed versions. Internet Archive's terms
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