# Fabrication Techniques for MEMs-based Sensors: Clinical Perspective

- Institution: IISc Bangalore
- Department: Electrical Engineering
- Teacher: Prof. Hardik Jeetendra Pandya
- Level: Undergraduate
- Language: English
- Subjects: Engineering
- Source: [NPTEL](https://nptel.ac.in/courses/108108113)
- Licence: [CC BY-NC-SA](https://nptel.ac.in/faq) (Non-commercial use only.)
- Syllabus: [at the source](https://nptel.ac.in/courses/108108113)
- Who can watch: Teens profiles and older (sources give no ratings; placed by Invisible Network from the source's own words)

This course is designed with an aim of educating students in the area of microtechnology and its use to fabricate sensors and systems. The students will have an exposure to sensors and its importance in the real world. The students will also able to understand how to fabricate some of those sensors. Several examples of engineering devices used in clinical research will be also covered. Class 10000 non-conventional clean room and some equipment within it will also be shown. Below are some of the course outcomes. Ability to understand microfabrication process Understand sensors used in electronics and biomedical areas Understand Clean Room (Class 1 to Class 10000) Understand Microengineering Technology Design the process flow for fabricating microheater required in gas sensors. Design the process flow for fabricating forces sensors for biomedical application. Design microheater for gas sensors as per specifications. Design force sensors as per specifications. Understand fabrication of microfluidic platforms, micro-cantilevers, flexible force sensors, inter-digitated electrodes, polymer-glass bonding etc. for clinical research

INTENDED AUDIENCE : Engineering Students, Faculty from Engineering Colleges

PREREQUISITES : Basic Electronics

INDUSTRY SUPPORT : Companies working in semiconductors and integrated circuits: Intel, AMD, Samsung, Texas Instruments, Analog Devices etc.

## Lectures

1. [Introduction to Microengineering Devices](https://invisiblenetwork.ai/learn/nptel/108108113/695a9be03eb3) (YouTube)
2. [Introduction to Microengineering Devices Contd.](https://invisiblenetwork.ai/learn/nptel/108108113/4532b2601ac2) (YouTube)
3. [Introduction to Microengineering Devices Contd.](https://invisiblenetwork.ai/learn/nptel/108108113/fcd11915e393) (YouTube)
4. [Silicon, silicon di-oxide and photolithography](https://invisiblenetwork.ai/learn/nptel/108108113/2fa27e15ff16) (YouTube)
5. [Silicon, silicon di-oxide and photolithography contd..](https://invisiblenetwork.ai/learn/nptel/108108113/01ca42db8336) (YouTube)
6. [Physical Vapour Deposition](https://invisiblenetwork.ai/learn/nptel/108108113/6ea47e7e616a) (YouTube)
7. [Physical Vapour Deposition contd…](https://invisiblenetwork.ai/learn/nptel/108108113/9fb137cc78e3) (YouTube)
8. [Photolithography](https://invisiblenetwork.ai/learn/nptel/108108113/7a5219807b7d) (YouTube)
9. [Mask Aligner](https://invisiblenetwork.ai/learn/nptel/108108113/8202a5063044) (YouTube)
10. [Mask Aligner contd…](https://invisiblenetwork.ai/learn/nptel/108108113/97e5da536104) (YouTube)
11. [Micromachining](https://invisiblenetwork.ai/learn/nptel/108108113/dcd71c03372d) (YouTube)
12. [Micromachining: Fabrication of VOC Sensor](https://invisiblenetwork.ai/learn/nptel/108108113/2e20e026befe) (YouTube)
13. [Micromachining: Fabrication of VOC Sensor contd…](https://invisiblenetwork.ai/learn/nptel/108108113/a626e2577862) (YouTube)
14. [Micromachining: Fabrication of VOC Sensor and Cantilever](https://invisiblenetwork.ai/learn/nptel/108108113/633dc6e15297) (YouTube)
15. [Chemical Vapour Deposition](https://invisiblenetwork.ai/learn/nptel/108108113/999cecac2489) (YouTube)
16. [Typical Microfabricated Devices for Biomedical Applications](https://invisiblenetwork.ai/learn/nptel/108108113/4f66d32e76cb) (YouTube)
17. [Cancer Diagnostic Tool](https://invisiblenetwork.ai/learn/nptel/108108113/7b0d3a6b0cf8) (YouTube)
18. [Process flow for Fabrication of Micro Heater](https://invisiblenetwork.ai/learn/nptel/108108113/934e58533cc3) (YouTube)
19. [Process flow for Fabrication of Interdigited Electrodes](https://invisiblenetwork.ai/learn/nptel/108108113/540597ce11f1) (YouTube)
20. [Process flow for Fabrication of Interdigited Electrodes contd.](https://invisiblenetwork.ai/learn/nptel/108108113/f9e188d05540) (YouTube)
21. [Process flow for Fabrication of ETM phenotyping](https://invisiblenetwork.ai/learn/nptel/108108113/c9a4ab5632ec) (YouTube)
22. [Process flow for Fabrication of Piezo canteliver](https://invisiblenetwork.ai/learn/nptel/108108113/3d618a0b0671) (YouTube)
23. [MEMS Based Sensors for Cancer Diagnosis](https://invisiblenetwork.ai/learn/nptel/108108113/8e4375b6229c) (YouTube)
24. [Electrical Properties of Breast Tissue](https://invisiblenetwork.ai/learn/nptel/108108113/97e6e95b9e56) (YouTube)
25. [Microfluidic chip for Evaluating Efficacy of Immunotherapy Drugs](https://invisiblenetwork.ai/learn/nptel/108108113/2554702fc009) (YouTube)
26. [Microfluidic chip for Evaluating Efficacy of Immunotherapy Drugs contd…](https://invisiblenetwork.ai/learn/nptel/108108113/ef325af391d5) (YouTube)
27. [Microchip for Rapid Drug Screening](https://invisiblenetwork.ai/learn/nptel/108108113/8fc25f4f6b86) (YouTube)
28. [Microchip for Rapid Drug Screening contd…](https://invisiblenetwork.ai/learn/nptel/108108113/439366ffc975) (YouTube)
29. [A Microfluidic chip for rapid bacterial antibiotic Susceptibility testing](https://invisiblenetwork.ai/learn/nptel/108108113/14562f5e89c5) (YouTube)
30. [Smart Catheter](https://invisiblenetwork.ai/learn/nptel/108108113/1510f1a58366) (YouTube)
31. [Smart Catheter: Flexible Force Sensor](https://invisiblenetwork.ai/learn/nptel/108108113/66c0b77124b1) (YouTube)
32. [Smart Catheter: Flexible Force Sensor contd…](https://invisiblenetwork.ai/learn/nptel/108108113/1541885351bf) (YouTube)
33. [Tissue and Cell Culture Techniques](https://invisiblenetwork.ai/learn/nptel/108108113/118f2ea2b915) (YouTube)
34. [Clean Room: Equipments Required](https://invisiblenetwork.ai/learn/nptel/108108113/7cbc6d03ad17) (YouTube)
35. [GLP: Gowning Procedure for using Lab](https://invisiblenetwork.ai/learn/nptel/108108113/a9a9a11fbda9) (YouTube)
36. [Introduction to Equipments: Refridgerator](https://invisiblenetwork.ai/learn/nptel/108108113/faeba885485d) (YouTube)
37. [Gowning Procedure for using Biological Lab Setup](https://invisiblenetwork.ai/learn/nptel/108108113/036d31bcef82) (YouTube)
38. [Introduction to Equipments: Desiccator](https://invisiblenetwork.ai/learn/nptel/108108113/f4535ec04ca7) (YouTube)
39. [Introduction to Equipments: Impedance Analyzer](https://invisiblenetwork.ai/learn/nptel/108108113/35180029017d) (YouTube)
40. [Introduction to Equipments: DAQ](https://invisiblenetwork.ai/learn/nptel/108108113/a92b8e41e6d6) (YouTube)
41. [Function generator, Multimeter, Sampling, LabVIEW, NI-CDAQ](https://invisiblenetwork.ai/learn/nptel/108108113/1edd4af5e770) (YouTube)
42. [Introduction to Equipments: Stereo Microscope](https://invisiblenetwork.ai/learn/nptel/108108113/34606e15a0e6) (YouTube)
43. [Introduction to Equipments: Metallurgical Microscope](https://invisiblenetwork.ai/learn/nptel/108108113/373418719422) (YouTube)
44. [Introduction to Equipments: Inverted Microscope](https://invisiblenetwork.ai/learn/nptel/108108113/b4758cc83b2d) (YouTube)
45. [Introduction to Equipments: Fire Alarm](https://invisiblenetwork.ai/learn/nptel/108108113/cc17300340ae) (YouTube)
46. [Introduction to Equipments: Bio-safety Hood](https://invisiblenetwork.ai/learn/nptel/108108113/ccad761219b8) (YouTube)
47. [Introduction to Equipments: Peristaltic Pump](https://invisiblenetwork.ai/learn/nptel/108108113/593033110a41) (YouTube)
48. [Introduction to Equipments: Incubator](https://invisiblenetwork.ai/learn/nptel/108108113/a9f0fd50e82a) (YouTube)
49. [Introduction to Equipments: Oven](https://invisiblenetwork.ai/learn/nptel/108108113/633c4c3393fb) (YouTube)
50. [Introduction to Equipments: Micromanipulator](https://invisiblenetwork.ai/learn/nptel/108108113/dd9ed95a5c7d) (YouTube)
51. [PDMS Moulding](https://invisiblenetwork.ai/learn/nptel/108108113/dee715caa97e) (YouTube)
52. [3D Printing](https://invisiblenetwork.ai/learn/nptel/108108113/a0a3786100d1) (YouTube)
53. [Introduction to Fabricated Sensors](https://invisiblenetwork.ai/learn/nptel/108108113/bc6fff6ee434) (YouTube)
54. [Simulation: Electro- Thermo- Mechanical Properties of Micro-heater using COMSOL Multiphysics](https://invisiblenetwork.ai/learn/nptel/108108113/d980d8d1dc50) (YouTube)
55. [Simulation: Electro- Thermo- Mechanical Properties of Micro-heater using COMSOL Multiphysics contd...](https://invisiblenetwork.ai/learn/nptel/108108113/250957e894f7) (YouTube)