# Fundamentals of Micro and Nanofabrication - Institution: IISc Bangalore - Department: Electronics & Communication Engineering - Taught by: Prof. Sushobhan Avasthi, Prof. Shankar Selvaraja - Level: Undergraduate - Language: English - Subjects: Engineering, Society and politics - Source: [NPTEL](https://nptel.ac.in/courses/102108078) - Licence: [CC BY-NC-SA](https://nptel.ac.in/faq) (Non-commercial use only.) - Syllabus: [at the source](https://nptel.ac.in/courses/102108078) - Who can watch: Teens profiles and older (sources give no ratings; placed by Invisible Network from the source's own words) The course provides an in-depth understanding of top-down device fabrication. Focus is the unit processes typically used in micro & nanofabrication of devices. Both concepts and practical aspects are covered. Topics include crystal growth, doping, chemical vapor deposition, physical vapor deposition, photolithography, wet etching, dry etching, and packaging. The course is accessible to students from diverse backgrounds, such as materials, physics, chemistry, mechanical engineering, and electrical engineering.The course will be a derivative of NE203: Advanced Micro & Nano Fabrication Technology & Processes. Students from various departments outside CeNSE, e.g. Physics, Chemistry, ECE, DESE, IAP, routinely take the course. INTENDED AUDIENCE : Masters students interested in fundamentals of top-down micro and nanodevice fabrication PREREQUISITES : General background in physics, chemistry, materials, chemical engineering, mechanical engineering, or electronic engineering should be enough. INDUSTRY SUPPORT : Electronic Device Manufacturing ## Lectures 1. [Introduction](https://invisiblenetwork.ai/learn/nptel/102108078/5d8c4459ce20) (YouTube) 2. [Substrate](https://invisiblenetwork.ai/learn/nptel/102108078/737e946d6bfb) (YouTube) 3. [Substrate Contd](https://invisiblenetwork.ai/learn/nptel/102108078/f010e8998cd3) (YouTube) 4. [Introduction to cleanroom](https://invisiblenetwork.ai/learn/nptel/102108078/c444d1134072) (YouTube) 5. [Contamination and surface cleaning](https://invisiblenetwork.ai/learn/nptel/102108078/411fd286b731) (YouTube) 6. [Advanced cleaning techniques](https://invisiblenetwork.ai/learn/nptel/102108078/0c11e96b2c63) (YouTube) 7. [Defects](https://invisiblenetwork.ai/learn/nptel/102108078/cd60bf29ff0a) (YouTube) 8. [Diffusion](https://invisiblenetwork.ai/learn/nptel/102108078/b7842fe5a847) (YouTube) 9. [Diffusion -- Advacned Concepts](https://invisiblenetwork.ai/learn/nptel/102108078/796d3569e1a5) (YouTube) 10. [Ion Implantation](https://invisiblenetwork.ai/learn/nptel/102108078/daa062b21e1b) (YouTube) 11. [Ion Implantation Contd](https://invisiblenetwork.ai/learn/nptel/102108078/d0010d1560f8) (YouTube) 12. [Native Films](https://invisiblenetwork.ai/learn/nptel/102108078/a23a2af7f5ed) (YouTube) 13. [Native Films: Advanced Concepts](https://invisiblenetwork.ai/learn/nptel/102108078/b5f6bdc13ceb) (YouTube) 14. [Native Films: Defects at Si/SiO2 interface](https://invisiblenetwork.ai/learn/nptel/102108078/ae394d633dad) (YouTube) 15. [Methods and Some Definitions](https://invisiblenetwork.ai/learn/nptel/102108078/544af2576a12) (YouTube) 16. [Chemical Vapor Depostion: Basics](https://invisiblenetwork.ai/learn/nptel/102108078/b08fd97c520d) (YouTube) 17. [Chemical Vapor Depostion: Precursor Transport](https://invisiblenetwork.ai/learn/nptel/102108078/e0b6df8e389f) (YouTube) 18. [Chemical Vapor Depostion: Types of CVD Equipment](https://invisiblenetwork.ai/learn/nptel/102108078/a265c80c2aa1) (YouTube) 19. [Chemical Vapor Depostion: Nucleation and Growth](https://invisiblenetwork.ai/learn/nptel/102108078/34d60ce760b8) (YouTube) 20. [Chemical Vapor Depostion: Other Details](https://invisiblenetwork.ai/learn/nptel/102108078/3c9859abfe27) (YouTube) 21. [Atomic Layer Depostion](https://invisiblenetwork.ai/learn/nptel/102108078/852450285203) (YouTube) 22. [Atomic Layer Depostion Contd..](https://invisiblenetwork.ai/learn/nptel/102108078/30062a170b7a) (YouTube) 23. [Physical Vapor Deposition: Basics](https://invisiblenetwork.ai/learn/nptel/102108078/c8b849d0ab2b) (YouTube) 24. [Physical Vapor Deposition: Evaporation](https://invisiblenetwork.ai/learn/nptel/102108078/0cd1b3601ee1) (YouTube) 25. [Physical Vapor Deposition: Sputtering](https://invisiblenetwork.ai/learn/nptel/102108078/a35d201ae56b) (YouTube) 26. [Metallization: Contact resistance](https://invisiblenetwork.ai/learn/nptel/102108078/5b786ece6c27) (YouTube) 27. [Metallization: Electromigration and Epilogue](https://invisiblenetwork.ai/learn/nptel/102108078/cd2c357989ef) (YouTube) 28. [Pattern Transfer Basics](https://invisiblenetwork.ai/learn/nptel/102108078/252389d82370) (YouTube) 29. [Optical lithography basics: resist process-1](https://invisiblenetwork.ai/learn/nptel/102108078/543abab8c2e3) (YouTube) 30. [Optical lithography basics: resist process-2](https://invisiblenetwork.ai/learn/nptel/102108078/20f41fd1742f) (YouTube) 31. [Optical Lithography: Contact and Proximity printing](https://invisiblenetwork.ai/learn/nptel/102108078/9d5fb2ecf99c) (YouTube) 32. [Optical Lithography: Stepper and Scanner](https://invisiblenetwork.ai/learn/nptel/102108078/93d2bb82ed94) (YouTube) 33. [Projection Lithography: Image formation basics](https://invisiblenetwork.ai/learn/nptel/102108078/28469b8fe2d1) (YouTube) 34. [Projection Lithography: Image formation in photoresist](https://invisiblenetwork.ai/learn/nptel/102108078/a598603aa02f) (YouTube) 35. [Optical lithography: Surface Reflection](https://invisiblenetwork.ai/learn/nptel/102108078/787edc9a59f1) (YouTube) 36. [Optical Lithography: Mask Technology](https://invisiblenetwork.ai/learn/nptel/102108078/6cc1d92579ce) (YouTube) 37. [Lithography process technology glossary](https://invisiblenetwork.ai/learn/nptel/102108078/4686c82d1d88) (YouTube) 38. [Optical Lithography: Resolution enhancement](https://invisiblenetwork.ai/learn/nptel/102108078/55ca6e5fb471) (YouTube) 39. [Electron beam lithography: Basics](https://invisiblenetwork.ai/learn/nptel/102108078/36046c85ebbe) (YouTube) 40. [Electron beam lithography: Resist process](https://invisiblenetwork.ai/learn/nptel/102108078/c9af66f8fff5) (YouTube) 41. [Emerging lithography techniques](https://invisiblenetwork.ai/learn/nptel/102108078/292672185ed4) (YouTube) 42. [Etching Figures of Merit](https://invisiblenetwork.ai/learn/nptel/102108078/1a50186cbd34) (YouTube) 43. [Wet etching Basics](https://invisiblenetwork.ai/learn/nptel/102108078/5db1ad54fb52) (YouTube) 44. [Wet Ething Recipes](https://invisiblenetwork.ai/learn/nptel/102108078/cb0d40801297) (YouTube) 45. [Wet Ething Recipes](https://invisiblenetwork.ai/learn/nptel/102108078/b123c75c814c) (YouTube) 46. [Dry etch: Plasma Basics](https://invisiblenetwork.ai/learn/nptel/102108078/c1059486f521) (YouTube) 47. [Dry etch: Plasma etching basics](https://invisiblenetwork.ai/learn/nptel/102108078/278cdcef39a4) (YouTube) 48. [Dry etch: Plasma tool configuration](https://invisiblenetwork.ai/learn/nptel/102108078/af44ad5d21e2) (YouTube) 49. [Dry etch: Etch mechanism](https://invisiblenetwork.ai/learn/nptel/102108078/7f40d3babd71) (YouTube) 50. [Dry etch: Etch chemistry](https://invisiblenetwork.ai/learn/nptel/102108078/6284bc92867d) (YouTube) 51. [Chemical Mechanical Polishing (CMP): Basics](https://invisiblenetwork.ai/learn/nptel/102108078/f022bd9952ba) (YouTube) 52. [Chemical Mechanical Polishing (CMP): Tool and process](https://invisiblenetwork.ai/learn/nptel/102108078/7731c0f13f7d) (YouTube) 53. [Design for Manufacturability-1](https://invisiblenetwork.ai/learn/nptel/102108078/860f3438ae83) (YouTube) 54. [Design for Manufacturability-2](https://invisiblenetwork.ai/learn/nptel/102108078/e8cf3b461846) (YouTube) 55. [Design for Manufacturability: Case study](https://invisiblenetwork.ai/learn/nptel/102108078/93f62210dda2) (YouTube) 56. [Process Integration](https://invisiblenetwork.ai/learn/nptel/102108078/54e7f5c419d4) (YouTube) 57. [PV Integration - 1](https://invisiblenetwork.ai/learn/nptel/102108078/59e02d9139f8) (YouTube) 58. [PV Integration - 2](https://invisiblenetwork.ai/learn/nptel/102108078/a63fe5a781b2) (YouTube) 59. [Lab demo: Silicon Nitride cantilever fabrication-1](https://invisiblenetwork.ai/learn/nptel/102108078/3129533d2183) (YouTube) 60. [Lab demo: Silicon Nitride cantilever fabrication-2](https://invisiblenetwork.ai/learn/nptel/102108078/8747d5ec6cf2) (YouTube) 61. [CMOS process for photonics application](https://invisiblenetwork.ai/learn/nptel/102108078/044160fc97a3) (YouTube)