# Submicrometer and Nanometer Technology

- Institution: Massachusetts Institute of Technology
- Department: Electrical Engineering and Computer Science; Mechanical Engineering
- Taught by: Prof. George Barbastathis, Prof. Henry Smith, Prof. Karl Berggren
- Term: Spring 2006
- Level: Graduate
- Language: English
- Subjects: Computer science, Engineering
- Source: [MIT OpenCourseWare](https://ocw.mit.edu/courses/6-781j-submicrometer-and-nanometer-technology-spring-2006/)
- Licence: [CC BY-NC-SA 4.0](https://creativecommons.org/licenses/by-nc-sa/4.0/) (Non-commercial use only.)
- Syllabus: [at the source](https://ocw.mit.edu/courses/6-781j-submicrometer-and-nanometer-technology-spring-2006/pages/syllabus/)
- Readings: [at the source](https://ocw.mit.edu/courses/6-781j-submicrometer-and-nanometer-technology-spring-2006/pages/readings/)
- Who can watch: Tweens profiles and older (sources give no ratings; placed by Invisible Network from the source's own words)

This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, microphotonics, information storage, and nanotechnology will also be explored.

Acknowledgements

The Instructors would like to thank Bob Barsotti, Bryan Cord, and Ben Wunsch for their work on the Atomic Force Microscope video. They would also like to thank Bryan Cord for creating each video.

## Lectures

1. [SEM Inspection (no audio)](https://invisiblenetwork.ai/learn/mit/6-781j-submicrometer-and-nanometer-technology-spring-2006/461b3e28eac9) (Video)
2. [SEM Sample Preparation (no audio)](https://invisiblenetwork.ai/learn/mit/6-781j-submicrometer-and-nanometer-technology-spring-2006/ff933deaca77) (Video)
3. [SEM Sample Mounting (no audio)](https://invisiblenetwork.ai/learn/mit/6-781j-submicrometer-and-nanometer-technology-spring-2006/20433fb85295) (Video)
4. [Surface Profilometer (no audio)](https://invisiblenetwork.ai/learn/mit/6-781j-submicrometer-and-nanometer-technology-spring-2006/6a202060a3aa) (Video)
5. [Atomic Force Microscope (no audio)](https://invisiblenetwork.ai/learn/mit/6-781j-submicrometer-and-nanometer-technology-spring-2006/b4d684597858) (Video)
6. [Photoresist Spin (no audio)](https://invisiblenetwork.ai/learn/mit/6-781j-submicrometer-and-nanometer-technology-spring-2006/f6ae5119059f) (Video)
7. [Contact Lithography (no audio)](https://invisiblenetwork.ai/learn/mit/6-781j-submicrometer-and-nanometer-technology-spring-2006/53599303e7f9) (Video)