# Electrical Engineering C245 / Mechanical Engineering C218 - Fall 2010 - Institution: University of California, Berkeley - Teacher: Clark Tu-Cuong Nguyen - Year: 2010 - Level: Undergraduate - Language: English - Subjects: Engineering, Art, architecture and design - Source: [Internet Archive](https://archive.org/details/ucberkeley_webcast_itunesu_391534934) - Licence: [CC BY-NC-ND 3.0](http://creativecommons.org/licenses/by-nc-nd/3.0/) (Non-commercial use only, and no changed versions.) - Who can watch: Tweens profiles and older (sources give no ratings; placed by Invisible Network from the source's own words) EL ENG C245 LEC 001 Fa10 Introduction to MEMS Design ## Lectures 1. [Lecture 1](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d), 1 h 24 min (Video) 2. [Lecture 2: Benefits of Scaling I: faster speed (transistors, micromechanical resonators)](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-2), 1 h 22 min (Video) 3. [Lecture 3: Benefits of Scaling II: lower power consumption (micro-ovens), higher sensitivity (gas sensors)](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-3), 1 h 22 min (Video) 4. [Lecture 4: Benefits of Scaling III](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-4), 25 min (Video) 5. [Lecture 5: Process Modules I: Oxidation and Film Deposition](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-5), 1 h 21 min (Video) 6. [Lecture 6: Process Modules II: Oxidation, Film Deposition, Lithography Etching, and Doping](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-6), 1 h 23 min (Video) 7. [Lecture 7: Process Modiles III: Lithography, Etching, and Doping](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-7), 1 h 20 min (Video) 8. [Lecture 8: Surface Micromachining: Lithography, Etching and Doping](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-8), 1 h 23 min (Video) 9. [Lecture 9: Surface Micromachining II](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-9), 1 h 22 min (Video) 10. [Lecture 10: Surface Micromachining and Surface Micromachining III](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-10), 1 h 19 min (Video) 11. [Lecture 11: Mechanics of Materials for MEMS II: quality factor, beam bending](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-11), 1 h 20 min (Video) 12. [Lecture 12: Mechanics of Materials III: practical stress, beam combos, stressed folded flexures](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-12), 1 h 22 min (Video) 13. [Lecture 13: Energy Methods I: virtual work, energy formulations, tapered beam example](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-13), 1 h 22 min (Video) 14. [Lecture 14: Energy Methods II: clamped-clamped beam example, large deflection analysis, estimating resonance frequency](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-14), 1 h 22 min (Video) 15. [Lecture 15: Equivalent Circuits I: dynamic mass, stiffness, and damping, example: free-free beam, lumped mass-spring-damper circuit](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-15), 1 h 22 min (Video) 16. [Lecture 16: Equivalent Circuits II: electromechanical analogies, lossless transducers](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-16), 1 h 22 min (Video) 17. [Lecture 17: Lossless Transducers I: capacitive transducers, charge control, voltage control, spring suspend C, parallel-plate capacitive transducer, pull-in linearization](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-17), 1 h 22 min (Video) 18. [Lecture 18: Lossless Transducers II: electrical stiffness, comb drive, levitation](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-18), 1 h 21 min (Video) 19. [Lecture 19: Equivalent Circuits III: input modeling, force-to-velocity relationship and circuit, intro. to gyroscopes](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-19), 1 h 19 min (Video) 20. [Lecture 20: Equivalent Circuits IV: output modeling, input-to-output transconductance, complete equivalent circuit](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-20), 1 h 22 min (Video) 21. [Lecture 21: Sensing Circuits I: ideal op amps, velocity sensing, position sensing](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-21), 1 h 15 min (Video) 22. [Lecture 22: Sensing Circuits II: differential position sensing, MEMS/transistor integration](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-22), 1 h 24 min (Video) 23. [Lecture 23: Sensing Circuits III: non-ideal op amps, begin noise](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-23), 1 h 20 min (Video) 24. [Lecture 24: Sensor Resolution I: noise sources, noise calculation, min. detectable signal](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-24), 1 h 21 min (Video) 25. [Lecture 25: Sensor Resolution II: noise calculation examples, gyro example](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-25), 1 h 23 min (Video) 26. [Lecture 26: MEMS-Transistor Integration mixed, MEMS-first, MEMS-last](https://invisiblenetwork.ai/learn/ia/ucberkeley_webcast_itunesu_391534934/77f554c4455d-26), 1 h 7 min (Video)